Publication:
Hexagonal hole array patterning for memory applications
Date
| dc.contributor.author | Singh, Arjun | |
| dc.contributor.author | Chan, BT | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.imecauthor | Singh, Arjun | |
| dc.contributor.imecauthor | Chan, BT | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.contributor.orcidimec | Chan, BT::0000-0003-2890-0388 | |
| dc.date.accessioned | 2021-10-22T22:56:42Z | |
| dc.date.available | 2021-10-22T22:56:42Z | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0914-9244 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25915 | |
| dc.identifier.url | http://doi.org/10.2494/photopolymer.28.623 | |
| dc.source.beginpage | 623 | |
| dc.source.endpage | 629 | |
| dc.source.issue | 5 | |
| dc.source.journal | Journal of Photopolymer Science and Technology | |
| dc.source.volume | 28 | |
| dc.title | Hexagonal hole array patterning for memory applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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