Publication:

Dielectric properties of spin-on metal oxides and their applications for 2D semiconductor devices

Date

2016
Presentation
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dc.contributor.authorSayan, Safak
dc.contributor.authorLin, Dennis
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorChiappe, Daniele
dc.contributor.authorSutar, Surajit
dc.contributor.authorRadu, Iuliana
dc.contributor.authorThean, Aaron
dc.contributor.authorPetermann, Claire
dc.contributor.authorHong, Sung Eun
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorSutar, Surajit
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorPetermann, Claire
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.accessioned2021-10-23T14:37:54Z
dc.date.available2021-10-23T14:37:54Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27272
dc.identifier.urlhttps://spie.org/AL16/conferencedetails/advances-resist-patterning-materials-processes
dc.source.conferenceSPIE Advanced Lithography Conference
dc.source.conferencedate22/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.title

Dielectric properties of spin-on metal oxides and their applications for 2D semiconductor devices

dc.typeOral presentation
dspace.entity.typePublication
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