Publication:

CMOS processes as basis for microsystem technology

Date

1999
Proceedings Paper
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dc.contributor.authorHermans, Lou
dc.contributor.authorBaert, Kris
dc.date.accessioned2021-10-06T11:19:49Z
dc.date.available2021-10-06T11:19:49Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3505
dc.source.beginpage33
dc.source.conferenceMIDEM - 35th International Conference on Microelectronics, Devices and Materials and Workshop on Microsystems
dc.source.conferencedate13/10/1999
dc.source.conferencelocationLjubljana Slovenia
dc.source.endpage41
dc.title

CMOS processes as basis for microsystem technology

dc.typeProceedings paper
dspace.entity.typePublication
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