Publication:
Scaling of sol-gel PZT ferroelectric capacitors for low-voltage operation
Date
| dc.contributor.author | Wouters, Dirk | |
| dc.contributor.author | Norga, Gerd | |
| dc.contributor.author | Beckers, Françoise | |
| dc.contributor.author | Bogaerts, Lieve | |
| dc.contributor.author | Maes, Herman | |
| dc.contributor.imecauthor | Bogaerts, Lieve | |
| dc.date.accessioned | 2021-09-30T10:09:30Z | |
| dc.date.available | 2021-09-30T10:09:30Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2316 | |
| dc.source.conference | 9th International Symposium on Integrated Ferroelectrics - ISIF | |
| dc.source.conferencedate | 3/03/1997 | |
| dc.source.conferencelocation | Santa Fe, NM USA | |
| dc.title | Scaling of sol-gel PZT ferroelectric capacitors for low-voltage operation | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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