Publication:

Quantitative modelling of deposition of airborne molecular contamination

Date

2019-10
Proceedings Paper
https://doi.org/10.1149/09202.0237ecst
Simple item page Full metadata Statistics
 
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorMertens, Paul
dc.date.accessioned2021-10-27T13:54:10Z
dc.date.available2021-10-27T13:54:10Z
dc.date.embargo9999-12-31
dc.date.issued2019-10
dc.identifier.doi10.1149/09202.0237ecst
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33578
dc.source.beginpage237
dc.source.conference236th ECS Fall Meeting16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)
dc.source.conferencedate13/10/2019
dc.source.conferencelocationAtlanta, GA USA
dc.source.endpage244
dc.title

Quantitative modelling of deposition of airborne molecular contamination

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
43834.pdf
Size:
210.01 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions