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Diamond nanoprobes for electrical probing of nanoelectronics device structures

Date

2013
Meeting abstract
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dc.contributor.authorHantschel, Thomas
dc.contributor.authorClarysse, Trudo
dc.contributor.authorNuytten, Thomas
dc.contributor.authorParedis, Kristof
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.date.accessioned2021-10-21T08:08:17Z
dc.date.available2021-10-21T08:08:17Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22459
dc.source.conference39th International Conference on Micro and Nano Engineering - MNE
dc.source.conferencedate16/09/2013
dc.source.conferencelocationLondon UK
dc.title

Diamond nanoprobes for electrical probing of nanoelectronics device structures

dc.typeMeeting abstract
dspace.entity.typePublication
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