Publication:
Grain size and orientation in ternary Co1-xNixSi2 thin films on Si(100): influence of the Ni content
Date
| dc.contributor.author | Smeets, D. | |
| dc.contributor.author | Vantomme, Andre | |
| dc.contributor.author | Drijbooms, Chris | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.imecauthor | Vantomme, Andre | |
| dc.contributor.imecauthor | Drijbooms, Chris | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-15T16:19:03Z | |
| dc.date.available | 2021-10-15T16:19:03Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9612 | |
| dc.source.conference | E-MRS Spring Meeting Symposium B: Materials Science Issues in Advanced CMOS Source-Drain Engineering | |
| dc.source.conferencedate | 24/05/2004 | |
| dc.source.conferencelocation | Strassbourg France | |
| dc.title | Grain size and orientation in ternary Co1-xNixSi2 thin films on Si(100): influence of the Ni content | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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