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Conference contributions
Ultra low dielectric constant materials for 22 nm technology node and beyond
Publication:
Ultra low dielectric constant materials for 22 nm technology node and beyond
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Date
2011
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baklanov, Mikhaïl
;
Smirnov, Evgeny
;
Zhao, Larry
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1959
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-11
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Metrics
Views
1959
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-11
Citations