Publication:

High-Density Standard Cell Libraries with Backside Power Options in A14 Nanosheet Node

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3010866
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dc.contributor.authorKükner, Halil
dc.contributor.authorMirabelli, Gioele
dc.contributor.authorYang, Sheng
dc.contributor.authorZhou, Yun
dc.contributor.authorMakarov, Alexander
dc.contributor.authorXiang, Yang
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorVeloso, Anabela
dc.contributor.authorZografos, Odysseas
dc.contributor.authorWeckx, Pieter
dc.contributor.authorRyckaert, Julien
dc.contributor.authorHellings, Geert
dc.contributor.imecauthorMirabelli, Gioele
dc.contributor.imecauthorYang, Sheng
dc.contributor.imecauthorZhou, Yun
dc.contributor.imecauthorMakarov, Alexander
dc.contributor.imecauthorXiang, Yang
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorZografos, Odysseas
dc.contributor.imecauthorWeckx, Pieter
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorKükner, Halil
dc.contributor.orcidimecMirabelli, Gioele::0000-0001-7060-4836
dc.contributor.orcidimecYang, Sheng::0000-0002-0658-5316
dc.contributor.orcidimecZhou, Yun::0000-0001-5879-6142
dc.contributor.orcidimecMakarov, Alexander::0000-0002-9927-6511
dc.contributor.orcidimecXiang, Yang::0000-0003-0091-6935
dc.contributor.orcidimecBoemmels, Juergen::0000-0002-8761-5213
dc.contributor.orcidimecZografos, Odysseas::0000-0002-9998-8009
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecKükner, Halil::0000-0002-6844-309X
dc.date.accessioned2024-08-19T15:13:47Z
dc.date.available2024-06-15T17:25:02Z
dc.date.available2024-08-19T15:13:47Z
dc.date.embargo2024-04-10
dc.date.issued2024
dc.identifier.doi10.1117/12.3010866
dc.identifier.eisbn978-1-5106-7215-4
dc.identifier.isbn978-1-5106-7214-7
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44031
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage1295409
dc.source.conferenceConference on DTCO and Computational Patterning III
dc.source.conferencedateFEB 26-29, 2024
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages7
dc.source.volume12954
dc.title

High-Density Standard Cell Libraries with Backside Power Options in A14 Nanosheet Node

dc.typeProceedings paper
dspace.entity.typePublication
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