Publication:

Si recess etch for 3D stacked IC applications.

Date

2010
Meeting abstract
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Author(s)

Van Cauwenberghe, Marc  
;
Tutunjyan, Nina  
;
Jamieson, Geraldine  
;
Verdonck, Patrick  
;
Huyghebaert, Cedric  
;
Jourdain, Anne  
;
Conard, Thierry  
;
Boullart, Werner  
;
Travaly, Youssef
;
Swinnen, Bart  

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Abstract

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1923 since deposited on 2021-10-18
Acq. date: 2026-02-28

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1923 since deposited on 2021-10-18
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