Publication:

Measurement of nanoparticles on silicon wafer surface using haze signal by light scattering

Date

2005
Proceedings Paper
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dc.contributor.authorXu, Kaidong
dc.contributor.authorVos, Rita
dc.contributor.authorVereecke, Guy
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorKraus, H.
dc.contributor.authorMertens, Paul
dc.contributor.authorVinckier, Chris
dc.contributor.authorKovacs, F.
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-16T07:17:05Z
dc.date.available2021-10-16T07:17:05Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11578
dc.source.conferenceEuropean Aerosol Conference - EAC European Aerosol Conference 2005 (EAC2005) European Aerosol Conference 2005
dc.source.conferencedate28/08/2005
dc.source.conferencelocationGent Belgium
dc.title

Measurement of nanoparticles on silicon wafer surface using haze signal by light scattering

dc.typeProceedings paper
dspace.entity.typePublication
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