Publication:
Reliability of copper dual damascene influenced by pre-clean
Date
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Lanckmans, Filip | |
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Van Hove, Marleen | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Hens, S. | |
| dc.contributor.author | Van Landuyt, J. | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Van den Bosch, Geert | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
| dc.date.accessioned | 2021-10-14T23:22:49Z | |
| dc.date.available | 2021-10-14T23:22:49Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6885 | |
| dc.source.beginpage | 118 | |
| dc.source.conference | Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA | |
| dc.source.conferencedate | 8/07/2002 | |
| dc.source.conferencelocation | Singapore | |
| dc.source.endpage | 123 | |
| dc.title | Reliability of copper dual damascene influenced by pre-clean | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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