Publication:
Study of DSA interaction range using Gaussian convolution
Date
| dc.contributor.author | Yi, Linda | |
| dc.contributor.author | Bekaert, Joost | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | Fenger, Germain | |
| dc.contributor.author | Nafus, Kathleen | |
| dc.contributor.author | Wong, H.-S. | |
| dc.contributor.imecauthor | Bekaert, Joost | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.contributor.imecauthor | Nafus, Kathleen | |
| dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
| dc.date.accessioned | 2021-10-23T01:22:03Z | |
| dc.date.available | 2021-10-23T01:22:03Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26217 | |
| dc.identifier.url | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2211993 | |
| dc.source.beginpage | 94232A | |
| dc.source.conference | Alternative Lithographic Technologies VII | |
| dc.source.conferencedate | 23/02/2015 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Study of DSA interaction range using Gaussian convolution | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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