Publication:
A new power MEMS component with variable capacitance
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
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| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
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| cris.virtualsource.orcid | cc118a04-c678-44c5-b8cc-b1b8db0ebc94 | |
| cris.virtualsource.orcid | abd3cb29-99a7-44a4-8540-c5a1fa0d9d20 | |
| cris.virtualsource.orcid | f7390e0c-db1d-4006-8b92-32b9006541ba | |
| cris.virtualsource.orcid | a425612d-2cfa-4e79-ac6a-6b49f02576a6 | |
| dc.contributor.author | Sterken, Tom | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | Borghs, Gustaaf | |
| dc.contributor.author | Mertens, Robert | |
| dc.contributor.imecauthor | Sterken, Tom | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.imecauthor | Borghs, Gustaaf | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.date.accessioned | 2021-10-15T06:49:38Z | |
| dc.date.available | 2021-10-15T06:49:38Z | |
| dc.date.issued | 2003 | |
| dc.identifier.doi | 10.37665/ppQLFWW89817 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8180 | |
| dc.source.beginpage | 27 | |
| dc.source.conference | Proceedings Pan Pacific Microelectronics Symposium | |
| dc.source.conferencedate | 18/02/2003 | |
| dc.source.conferencelocation | Kohala Coast USA | |
| dc.source.endpage | 34 | |
| dc.title | A new power MEMS component with variable capacitance | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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