Cost effective FinFET platform for stand alone DRAM 1Y and beyond memory periphery

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Author(s)

Spessot, Alessio

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Ritzenthaler, Romain

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Dentoni Litta, Eugenio

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Mallik, Arindam

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De Keersgieter, An

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Parvais, Bertrand

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Sherazi, Yasser

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Machkaoutsan, Vladimir

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Horiguchi, Naoto

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2027 since deposited on 2021-10-26

Acq. date: 2025-10-23