Publication:

Noise diagnostics of advanced silicon substrates and deep submicron process modules

Date

2002
Meeting abstract
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dc.contributor.authorSimoen, Eddy
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.date.accessioned2021-10-14T23:11:52Z
dc.date.available2021-10-14T23:11:52Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6834
dc.source.conference202nd Meeting of the Electrochemical Society: Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
dc.source.conferencedate20/10/2002
dc.source.conferencelocationSalt Lake City, UT USA
dc.title

Noise diagnostics of advanced silicon substrates and deep submicron process modules

dc.typeMeeting abstract
dspace.entity.typePublication
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