Publication:

EUVL is being inserted in HVM in 2019 : what are the mask related challenges remaining ?

Date

2019
Proceedings Paper
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dc.contributor.authorRonse, Kurt
dc.contributor.authorJonckheere, Rik
dc.contributor.authorGallagher, Emily
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorVan Look, Lieve
dc.contributor.authorHendrickx, Eric
dc.contributor.authorKim, Ryan Ryoung han
dc.contributor.imecauthorRonse, Kurt
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorGallagher, Emily
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.date.accessioned2021-10-27T17:14:38Z
dc.date.available2021-10-27T17:14:38Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33906
dc.identifier.urlhttps://doi.org/10.1117/12.2535821
dc.source.beginpage111770A
dc.source.conference35th European Mask and Lithography Conference (EMLC 2019)
dc.source.conferencedate17/06/2019
dc.source.conferencelocationDresden Germany
dc.title

EUVL is being inserted in HVM in 2019 : what are the mask related challenges remaining ?

dc.typeProceedings paper
dspace.entity.typePublication
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