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Integration of silicon etched waveguides with MCM-D for V- and W-band

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dc.contributor.authorOcket, Ilja
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorCarchon, Geert
dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Raedt, Walter
dc.contributor.imecauthorOcket, Ilja
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.date.accessioned2021-10-16T03:43:20Z
dc.date.available2021-10-16T03:43:20Z
dc.date.issued2005-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10945
dc.source.beginpage2115
dc.source.conferenceIEEE MTT International Microwave Symposium
dc.source.conferencedate12/06/2005
dc.source.conferencelocationLeuven Belgium
dc.source.endpage2118
dc.title

Integration of silicon etched waveguides with MCM-D for V- and W-band

dc.typeProceedings paper
dspace.entity.typePublication
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