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Effect of precoat on the sidewall profile of through silicon via's
Publication:
Effect of precoat on the sidewall profile of through silicon via's
Date
2013
Meeting abstract
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26563.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Babaei Gavan, Khashayar
;
Lazzarino, Frederic
;
Brouri, Mohand
;
Tutunjyan, Nina
;
de Marneffe, Jean-Francois
;
Kunnen, Eddy
;
Xu, Kaidong
Journal
Abstract
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1
since deposited on 2021-10-21
Acq. date: 2025-10-22
Views
1987
since deposited on 2021-10-21
Acq. date: 2025-10-22
Citations
Metrics
Downloads
1
since deposited on 2021-10-21
Acq. date: 2025-10-22
Views
1987
since deposited on 2021-10-21
Acq. date: 2025-10-22
Citations