Publication:

Nanoscale etching of III-V semiconductors in acidic H2O2 solutions

Date

2013

Meeting abstract

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Files

28494.pdf 196.34 KB

Author(s)

van Dorp, Dennis

;

Arnauts, Sophia

;

Cuypers, Daniel

;

;

Holsteyns, Frank

;

De Gendt, Stefan

Statistics

1911 since deposited on 2021-10-21

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Acq. date: 2026-02-24