Analysis of the structural properties of polycrystalline silicon germanium films

dc.contributor.author	Sedky, Sherif
dc.contributor.author	Fiorini, Paolo
dc.contributor.author	Loreti, S.
dc.contributor.author	Caymax, Matty
dc.contributor.author	Baert, Kris
dc.contributor.author	Van Hoof, Chris
dc.contributor.imecauthor	Caymax, Matty
dc.contributor.imecauthor	Van Hoof, Chris
dc.date.accessioned	2021-10-14T11:38:18Z
dc.date.available	2021-10-14T11:38:18Z
dc.date.issued	1999
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3816
dc.source.beginpage	67
dc.source.conference	ICM'99. The eleventh international conference on microelectronics. Proceedings;
dc.source.conferencelocation
dc.source.endpage	70
dc.title	Analysis of the structural properties of polycrystalline silicon germanium films
dc.type	Proceedings paper
dspace.entity.type	Publication
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