Publication:

FIB/SEM structural analysis of through-silicon-vias

Date

2011
Presentation
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dc.contributor.authorBender, Hugo
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorRadisic, Alex
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorRadisic, Alex
dc.date.accessioned2021-10-19T12:33:18Z
dc.date.available2021-10-19T12:33:18Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18550
dc.source.conferenceEuropean FIB User Group Meeting
dc.source.conferencedate3/10/2011
dc.source.conferencelocationBordeaux France
dc.title

FIB/SEM structural analysis of through-silicon-vias

dc.typeOral presentation
dspace.entity.typePublication
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