Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Role of copper in time dependent dielectric breakdown of porous organo-silicate glass low-k materials
Publication:
Role of copper in time dependent dielectric breakdown of porous organo-silicate glass low-k materials
Copy permalink
Date
2011
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
24066.pdf
1.12 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Larry
;
Pantouvaki, Marianna
;
Croes, Kristof
;
Tokei, Zsolt
;
Barbarin, Yohan
;
Wilson, Chris
;
Baklanov, Mikhaïl
;
Beyer, Gerald
;
Claeys, Cor
Journal
Applied Physics Letters
Abstract
Description
Metrics
Views
1905
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations
Metrics
Views
1905
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations