Recombination probabilities of O and H atoms on the surface of nanoporous Low-k SiCOH dielectrics

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Author(s)

Braginsky, O.V.

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Mankelevich, Y.A.

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Rakhimova, T.V.

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Vasilieva, A.N.

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Baklanov, Mikhaïl

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1931 since deposited on 2021-10-17

Acq. date: 2025-10-24