Publication:

Recombination probabilities of O and H atoms on the surface of nanoporous Low-k SiCOH dielectrics

Date

2008

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

Braginsky, O.V.

;

;

;

;

Mankelevich, Y.A.

;

Rakhimova, T.V.

;

;

Vasilieva, A.N.

;

;

Baklanov, Mikhaïl

Metrics

1936 since deposited on 2021-10-17

3last month

2last week

Acq. date: 2025-12-12