Publication:

Recombination probabilities of O and H atoms on the surface of nanoporous Low-k SiCOH dielectrics

Date

2008

Meeting abstract

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Author(s)

Braginsky, O.V.

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;

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Mankelevich, Y.A.

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Rakhimova, T.V.

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Vasilieva, A.N.

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;

Baklanov, Mikhaïl

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Acq. date: 2026-04-06