Publication:
The road to flexible MEMS integration
Date
| dc.contributor.author | Witvrouw, Ann | |
| dc.date.accessioned | 2021-10-17T12:49:35Z | |
| dc.date.available | 2021-10-17T12:49:35Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14792 | |
| dc.identifier.url | http://www.mrs.org/s_mrs/sec_subsribe.asp?CID=12438&DID=2150477action=detail | |
| dc.source.beginpage | 1075-J05-01 | |
| dc.source.conference | Passive and Electromechanical Marterials and Integration | |
| dc.source.conferencedate | 24/03/2008 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | The road to flexible MEMS integration | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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