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Chemical analysis of nickel silicides with high spatial resolution by combined EDS, EELS and ELNES

Date

2010
Journal article
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dc.contributor.authorVerleysen, Eveline
dc.contributor.authorBender, Hugo
dc.contributor.authorSchryvers, Dominique
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-18T23:51:19Z
dc.date.available2021-10-18T23:51:19Z
dc.date.issued2010
dc.identifier.issn1742-6588
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18281
dc.source.beginpage12057
dc.source.issue1
dc.source.journalJournal of Physics Conference Series
dc.source.volume209
dc.title

Chemical analysis of nickel silicides with high spatial resolution by combined EDS, EELS and ELNES

dc.typeJournal article
dspace.entity.typePublication
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