Publication:
Laser-assisted removal of particles on silicon wafers
Date
| dc.contributor.author | Vereecke, Guy | |
| dc.contributor.author | Röhr, Erika | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | Vereecke, Guy | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
| dc.date.accessioned | 2021-10-14T11:53:40Z | |
| dc.date.available | 2021-10-14T11:53:40Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3990 | |
| dc.source.beginpage | 3837 | |
| dc.source.endpage | 3843 | |
| dc.source.issue | 7 | |
| dc.source.journal | J. Appl. Phys. | |
| dc.source.volume | 85 | |
| dc.title | Laser-assisted removal of particles on silicon wafers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |