Publication:

Application of focused ion beam for failure analysis

Date

2000
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorBender, Hugo
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-10-14T12:40:42Z
dc.date.available2021-10-14T12:40:42Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4111
dc.source.beginpage45
dc.source.conferenceMIDEM - 35th International Conference on Microelectronics, Devices and Materials and Workshop on Microsystems
dc.source.conferencedate18/10/2000
dc.source.conferencelocationPostojna Slovenia
dc.source.endpage53
dc.title

Application of focused ion beam for failure analysis

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
4080.pdf
Size:
637.55 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions