Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Polarity effect on the temperature dependence of leakage current through HfO2/SiO2 gate dielectric stacks
Publication:
Polarity effect on the temperature dependence of leakage current through HfO2/SiO2 gate dielectric stacks
Date
2002
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Xu, Zhen
;
Houssa, Michel
;
De Gendt, Stefan
;
Heyns, Marc
Journal
Applied Physics Letters
Abstract
Description
Metrics
Views
1932
since deposited on 2021-10-15
Acq. date: 2025-10-24
Citations
Metrics
Views
1932
since deposited on 2021-10-15
Acq. date: 2025-10-24
Citations