Publication:
The thermal stability of ALD Zr:Al mixed oxide thin films: an in situ TEM study
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1864 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-10
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Metrics
Views
1864 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-10
Citations