Publication:
The thermal stability of ALD Zr:Al mixed oxide thin films: an in situ TEM study
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1870 since deposited on 2021-10-16
2last month
Acq. date: 2026-05-18
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Statistics
Views
1870 since deposited on 2021-10-16
2last month
Acq. date: 2026-05-18
Citations