Publication:
Guiding Principles for the Design of a Chemical Vapor Deposition Process for Highly Crystalline Transition Metal Dichalcogenides
| dc.contributor.author | Voronenkov, Vladislav | |
| dc.contributor.author | Groven, Benjamin | |
| dc.contributor.author | Medina Silva, Henry | |
| dc.contributor.author | Morin, Pierre | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.imecauthor | Voronenkov, Vladislav | |
| dc.contributor.imecauthor | Groven, Benjamin | |
| dc.contributor.imecauthor | Morin, Pierre | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Medina Silva, Henry | |
| dc.contributor.orcidimec | Voronenkov, Vladislav::0000-0001-6028-6678 | |
| dc.contributor.orcidimec | Groven, Benjamin::0000-0002-5781-7594 | |
| dc.contributor.orcidimec | Morin, Pierre::0000-0002-4637-496X | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.contributor.orcidimec | Medina Silva, Henry::0000-0003-1461-5703 | |
| dc.date.accessioned | 2024-09-25T09:20:59Z | |
| dc.date.available | 2024-03-27T17:34:16Z | |
| dc.date.available | 2024-09-25T09:20:59Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | The authors gratefully acknowledge the funding from the imec IIAP core CMOS programs and the European Union's Graphene Flagship grant agreement no. 952792. | |
| dc.identifier.doi | 10.1002/pssa.202300943 | |
| dc.identifier.issn | 1862-6300 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43736 | |
| dc.publisher | WILEY-V C H VERLAG GMBH | |
| dc.source.beginpage | Art. 2300943 | |
| dc.source.endpage | N/A | |
| dc.source.issue | 9 | |
| dc.source.journal | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | |
| dc.source.numberofpages | 14 | |
| dc.source.volume | 221 | |
| dc.subject.keywords | SELECTIVE-AREA GROWTH | |
| dc.subject.keywords | MOS2 THIN-FILMS | |
| dc.subject.keywords | ATOMIC LAYERS | |
| dc.subject.keywords | MOLYBDENUM | |
| dc.subject.keywords | TRANSPORT | |
| dc.subject.keywords | PRESSURE | |
| dc.subject.keywords | WATER | |
| dc.subject.keywords | VOLATILIZATION | |
| dc.subject.keywords | NUCLEATION | |
| dc.subject.keywords | HETEROSTRUCTURES | |
| dc.title | Guiding Principles for the Design of a Chemical Vapor Deposition Process for Highly Crystalline Transition Metal Dichalcogenides | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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