Publication:

Unbalanced RF magnetron sputtering of thin hexagonal boron nitride films

Date

2010
Meeting abstract
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dc.contributor.authorBenMoussa, B.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorBorschel, C.
dc.contributor.authorSaitner, M.
dc.contributor.authorSoltani, A.
dc.contributor.authorMortet, Vincent
dc.contributor.authorRonning, C.
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorBoyen, H.G.
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-18T15:20:21Z
dc.date.available2021-10-18T15:20:21Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16736
dc.source.conference4th International Conferenceon New Diamond and Nano Carbons - NDNC
dc.source.conferencedate16/05/2010
dc.source.conferencelocationSuzhou China
dc.title

Unbalanced RF magnetron sputtering of thin hexagonal boron nitride films

dc.typeMeeting abstract
dspace.entity.typePublication
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