Publication:

Effect of N2 annealing on AlZrO oxide

Date

2003
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorPetry, Jasmine
dc.contributor.authorRichard, Olivier
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorConard, Thierry
dc.contributor.authorChen, Jerry
dc.contributor.authorCosnier, Vincent
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-15T06:06:45Z
dc.date.available2021-10-15T06:06:45Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8001
dc.source.beginpage1482
dc.source.endpage1487
dc.source.issue4
dc.source.journalJournal of Vacuum Science & Technology A
dc.source.volume21
dc.title

Effect of N2 annealing on AlZrO oxide

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles