Publication:
Opportunities and challenges in immersion lithography
Date
| dc.contributor.author | Maenhoudt, Mireille | |
| dc.contributor.author | Vandenberghe, Geert | |
| dc.contributor.author | Ercken, Monique | |
| dc.contributor.author | Cheng, Shaunee | |
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.author | Ronse, Kurt | |
| dc.contributor.imecauthor | Vandenberghe, Geert | |
| dc.contributor.imecauthor | Ercken, Monique | |
| dc.contributor.imecauthor | Ronse, Kurt | |
| dc.contributor.orcidimec | Ronse, Kurt::0000-0003-0803-4267 | |
| dc.date.accessioned | 2021-10-16T03:07:46Z | |
| dc.date.available | 2021-10-16T03:07:46Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10819 | |
| dc.source.conference | Conference of Photopolymer Science and Technology | |
| dc.source.conferencedate | 24/06/2005 | |
| dc.source.conferencelocation | Chiba Japan | |
| dc.title | Opportunities and challenges in immersion lithography | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |