Publication:
Measurement technique, oxide thickness and area dependence of soft breakdown
Date
| dc.contributor.author | Nigam, Tanya | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | Maes, Herman | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-14T13:28:34Z | |
| dc.date.available | 2021-10-14T13:28:34Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4623 | |
| dc.source.beginpage | 337 | |
| dc.source.conference | Structural and Electronic Properties of Ultrathin Dielectrics on Silicon and Related Structures; November 1999; Boston, MA, USA. | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 343 | |
| dc.title | Measurement technique, oxide thickness and area dependence of soft breakdown | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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