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Conference contributions
Wet etch characteristics of Hf-silicates
Publication:
Wet etch characteristics of Hf-silicates
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Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claes, Martine
;
Paraschiv, Vasile
;
Dictus, Dries
;
Conard, Thierry
;
Boullart, Werner
;
Vanhaelemeersch, Serge
;
De Gendt, Stefan
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1861
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations
Metrics
Views
1861
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations