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Alternative integration of ultra low-k dielectrics by template replacement approach
Publication:
Alternative integration of ultra low-k dielectrics by template replacement approach
Date
2015
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhang, Liping
;
de Marneffe, Jean-Francois
;
Heylen, Nancy
;
Murdoch, Gayle
;
Tokei, Zsolt
;
Boemmels, Juergen
;
De Gendt, Stefan
;
Baklanov, Mikhaïl
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1918
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422
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Acq. date: 2025-10-25
Citations
Metrics
Views
1918
since deposited on 2021-10-23
422
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations