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Polarity dependent charge trapping in thin SiO2/Al2O3 gate staks with poly-Si gate electrodes: influence of high temperature annealing
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Polarity dependent charge trapping in thin SiO2/Al2O3 gate staks with poly-Si gate electrodes: influence of high temperature annealing
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lucci, Luca
;
Pantisano, Luigi
;
Cartier, Eduard
;
Kerber, Andreas
;
Groeseneken, Guido
;
Ho, M.Y.
;
Green, Martin
;
Selmi, L.
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1974
since deposited on 2021-10-14
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Acq. date: 2026-02-24
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Views
1974
since deposited on 2021-10-14
2
last month
1
last week
Acq. date: 2026-02-24
Citations