Publication:
Cleaning challenges associated with scaling boosters and performance enhancement for advanced logic devices
Date
| dc.contributor.author | Oniki, Yusuke | |
| dc.contributor.imecauthor | Oniki, Yusuke | |
| dc.contributor.orcidimec | Oniki, Yusuke::0000-0002-6619-1327 | |
| dc.date.accessioned | 2021-10-27T15:02:10Z | |
| dc.date.available | 2021-10-27T15:02:10Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33695 | |
| dc.source.conference | Surface Preparation and Cleaning Conference (SPCC) | |
| dc.source.conferencedate | 2/04/2019 | |
| dc.source.conferencelocation | Portland, OR US | |
| dc.title | Cleaning challenges associated with scaling boosters and performance enhancement for advanced logic devices | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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