Publication:
Enhancement of the relaxation of SiGe layers by He ion implantation using a delta-Si:C layer
Date
| dc.contributor.author | Buca, D. | |
| dc.contributor.author | Goryll, M. | |
| dc.contributor.author | Hollaender, B. | |
| dc.contributor.author | Trinkaus, H. | |
| dc.contributor.author | Mantl, S. | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Nguyen, Duy | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-16T15:12:55Z | |
| dc.date.available | 2021-10-16T15:12:55Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11823 | |
| dc.source.conference | MRS 2007 Spring Meeting Symposium F: Semiconductor Defect Engineering - Materials, Synthetic Structures and Devices II | |
| dc.source.conferencedate | 9/04/2007 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Enhancement of the relaxation of SiGe layers by He ion implantation using a delta-Si:C layer | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |