Hydrogen enhanced thermal donor formation in oxygen enriched high resistive float-zone silicon

dc.contributor.author	Job, R.
dc.contributor.author	Ulyashin, A. G.
dc.contributor.author	Fahrner, W. R.
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Claeys, Cor
dc.contributor.author	Tonelli, G.
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-14T21:55:41Z
dc.date.available	2021-10-14T21:55:41Z
dc.date.issued	2002
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/6441
dc.source.beginpage	116
dc.source.endpage	120
dc.source.issue	1_4
dc.source.journal	Nuclear Instruments & Methods in Physics Research B
dc.source.volume	186
dc.title	Hydrogen enhanced thermal donor formation in oxygen enriched high resistive float-zone silicon
dc.type	Journal article
dspace.entity.type	Publication
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