Publication:
Silicide induced pattern density and orientation dependent transconductance in MOS transistors
Date
| dc.contributor.author | Steegen, An | |
| dc.contributor.author | Stucchi, Michele | |
| dc.contributor.author | Lauwers, A. | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Stucchi, Michele | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T11:41:01Z | |
| dc.date.available | 2021-10-14T11:41:01Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3853 | |
| dc.source.beginpage | 497 | |
| dc.source.conference | International Electron Devices Meeting. Technical digest; 5-8 Dec. 1999; Washington, D.C., USA. | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 500 | |
| dc.title | Silicide induced pattern density and orientation dependent transconductance in MOS transistors | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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