Publication:
Numerical-experimental comparison of low-g and high-g tests on a polysilicon MEMS accelerometer
Date
| dc.contributor.author | Ghisi, A. | |
| dc.contributor.author | Kalicinski, Stanislaw | |
| dc.contributor.author | Mariani, S. | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Corigliano, A. | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-17T07:14:37Z | |
| dc.date.available | 2021-10-17T07:14:37Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13764 | |
| dc.source.conference | EuroSimE: Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems | |
| dc.source.conferencedate | 20/04/2008 | |
| dc.source.conferencelocation | Freiburg Germany | |
| dc.title | Numerical-experimental comparison of low-g and high-g tests on a polysilicon MEMS accelerometer | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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