Publication:
Nanosheet Transistors Produced in 300 mm Fabrication Platform for Quantum Computing
| dc.contributor.author | Rohrbacher, Claude | |
| dc.contributor.author | Leclerc, Dominic | |
| dc.contributor.author | Rivard, Joffrey | |
| dc.contributor.author | Ritzenthaler, Romain | |
| dc.contributor.author | Lupien, Christian | |
| dc.contributor.author | Mertens, Hans | |
| dc.contributor.author | Horiguchi, Naoto | |
| dc.contributor.author | Dupont-Ferrier, Eva | |
| dc.contributor.imecauthor | Ritzenthaler, Romain | |
| dc.contributor.imecauthor | Mertens, Hans | |
| dc.contributor.imecauthor | Horiguchi, Naoto | |
| dc.contributor.orcidimec | Ritzenthaler, Romain::0000-0002-8615-3272 | |
| dc.contributor.orcidimec | Mertens, Hans::0000-0002-3392-6892 | |
| dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
| dc.date.accessioned | 2025-06-06T04:50:32Z | |
| dc.date.available | 2025-06-06T04:50:32Z | |
| dc.date.issued | 2025-JUN | |
| dc.description.wosFundingText | This work was supported in part by the Canada First Research Excellence Fund, FRQNT etablissement de la releve professorale under Grant 2020-NC-268397, and in part by the NSERC under Grant RGPIN-2020-0573. | |
| dc.identifier.doi | 10.1109/LED.2025.3556348 | |
| dc.identifier.issn | 0741-3106 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45769 | |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | |
| dc.source.beginpage | 991 | |
| dc.source.endpage | 994 | |
| dc.source.issue | 6 | |
| dc.source.journal | IEEE ELECTRON DEVICE LETTERS | |
| dc.source.numberofpages | 4 | |
| dc.source.volume | 46 | |
| dc.subject.keywords | THRESHOLD | |
| dc.subject.keywords | QUBITS | |
| dc.subject.keywords | NOISE | |
| dc.subject.keywords | GATE | |
| dc.title | Nanosheet Transistors Produced in 300 mm Fabrication Platform for Quantum Computing | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |