3D analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artefacts

dc.contributor.author	Ke, Xiaoxing
dc.contributor.author	Bals, Sarah
dc.contributor.author	Cott, Daire
dc.contributor.author	Hantschel, Thomas
dc.contributor.author	Bender, Hugo
dc.contributor.author	Van Tendeloo, Gustaaf
dc.contributor.imecauthor	Cott, Daire
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Bender, Hugo
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned	2021-10-18T17:34:21Z
dc.date.available	2021-10-18T17:34:21Z
dc.date.issued	2010
dc.identifier.issn	1431-9276
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/17357
dc.source.beginpage	210
dc.source.endpage	217
dc.source.journal	Microscopy and Microanalysis
dc.source.volume	16
dc.title	3D analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artefacts
dc.type	Journal article
dspace.entity.type	Publication
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