Publication:
Patterning of SiO2/Si3N4 electret
Date
| dc.contributor.author | Leonov, Vladimir | |
| dc.contributor.author | van Schaijk, Rob | |
| dc.contributor.imecauthor | Leonov, Vladimir | |
| dc.contributor.orcidimec | Leonov, Vladimir::0000-0002-4364-8945 | |
| dc.date.accessioned | 2021-10-17T08:15:42Z | |
| dc.date.available | 2021-10-17T08:15:42Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14009 | |
| dc.source.conference | Proceedings of the 13th International Symposium on Electrets - ISE | |
| dc.source.conferencedate | 15/09/2008 | |
| dc.source.conferencelocation | Tokyo Japan | |
| dc.title | Patterning of SiO2/Si3N4 electret | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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