Publication:

80 nm tall thermally stable cost effective FinFETs for advanced dynamic random access memory periphery devices for artificial intelligence/machine learning and automotive applications

Date

2021
Journal article
https://doi.org/10.35848/1347-4065/abebbf
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dc.contributor.authorSpessot, Alessio
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorDupuy, Emmanuel
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorBastos, Joao
dc.contributor.authorCapogreco, Elena
dc.contributor.authorMiyaguchi, Kenichi
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorYoon, Younggwang
dc.contributor.authorFazan, Pierre
dc.contributor.authorHoriguchi, Naoto
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorDupuy, Emmanuel
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorBastos, Joao
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorMiyaguchi, Kenichi
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorYoon, Younggwang
dc.contributor.imecauthorFazan, Pierre
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecDupuy, Emmanuel::0000-0003-3341-1618
dc.contributor.orcidimecBastos, Joao::0000-0002-8877-9850
dc.contributor.orcidimecMiyaguchi, Kenichi::0000-0002-7073-6457
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.date.accessioned2022-03-09T13:02:59Z
dc.date.available2022-03-09T13:02:59Z
dc.date.issued2021
dc.identifier.doi10.35848/1347-4065/abebbf
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39390
dc.publisherIOP PUBLISHING LTD
dc.source.beginpageSBBB06
dc.source.issueSB
dc.source.journalJAPANESE JOURNAL OF APPLIED PHYSICS
dc.source.numberofpages7
dc.source.volume60
dc.title

80 nm tall thermally stable cost effective FinFETs for advanced dynamic random access memory periphery devices for artificial intelligence/machine learning and automotive applications

dc.typeJournal article
dspace.entity.typePublication
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