High-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography

Publication:

2007

Journal article

Author(s)

Assouar, M.B.

;

Elmazria, O.

;

Kirsch, P.

;

Alnot, P.

;

Mortet, V.

;

Tiusan, C.

Journal of Applied Physics

1966 since deposited on 2021-10-16

2last month

Acq. date: 2026-01-11