Publication:

E-TEST validation of EPE budget and metrology

Date

2020
Presentation
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dc.contributor.authorDe Poortere, Etienne
dc.contributor.authorSchelcher, Guillaume
dc.contributor.authorKissoon, Nicola
dc.contributor.authorPaolillo, Sara
dc.contributor.authorTabery, Cyrus
dc.contributor.authorHalder, Sandip
dc.contributor.authorLeray, Philippe
dc.contributor.authorMulkens, Jan
dc.contributor.authorMcManus, Moyra
dc.contributor.imecauthorDe Poortere, Etienne
dc.contributor.imecauthorSchelcher, Guillaume
dc.contributor.imecauthorKissoon, Nicola
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorLeray, Philippe
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2021-10-28T21:04:27Z
dc.date.available2021-10-28T21:04:27Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34991
dc.identifier.urlhttps://spie.org/AL20/conferencedetails/metrology-inspection-process-control-manufacturing?SSO=1
dc.source.conferenceSPIE advanced lithography - Metrology, Inspection, and Process Control for Microlithography XXXIV
dc.source.conferencedate23/02/2020
dc.source.conferencelocationonline online
dc.title

E-TEST validation of EPE budget and metrology

dc.typeOral presentation
dspace.entity.typePublication
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