Publication:

Impact of Cationic Stoichiometry on Physical, Optical and Electrical Properties of SrTiO3 Thin Films Grown on (001)-Oriented Si Substrates

Date

2024
Journal article
https://doi.org/10.3390/ma17081714
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dc.contributor.authorBaryshnikova, Marina
dc.contributor.authorBoelen, Andries
dc.contributor.authorCeccon, Luca
dc.contributor.authorHerreman, Vincent
dc.contributor.authorMcMitchell, Sean
dc.contributor.authorHaffner, Christian
dc.contributor.authorMerckling, Clement
dc.contributor.imecauthorBaryshnikova, Marina
dc.contributor.imecauthorBoelen, Andries
dc.contributor.imecauthorCeccon, Luca
dc.contributor.imecauthorHerreman, Vincent
dc.contributor.imecauthorHaffner, Christian
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorMcMitchell, Sean
dc.contributor.orcidimecBaryshnikova, Marina::0000-0002-5945-4459
dc.contributor.orcidimecBoelen, Andries::0000-0002-5380-7348
dc.contributor.orcidimecCeccon, Luca::0000-0002-8147-8713
dc.contributor.orcidimecHaffner, Christian::0000-0002-8947-5293
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecMcMitchell, Sean::0000-0002-9916-0973
dc.date.accessioned2024-08-06T08:15:53Z
dc.date.available2024-05-11T18:25:18Z
dc.date.available2024-08-06T08:15:53Z
dc.date.embargo2024-04-09
dc.date.issued2024
dc.description.wosFundingTextThe authors extend their gratitude to the Material and Component Analysis department at Imec for their invaluable assistance with sample characterization. Special recognition is given to Olivier Richard for his guidance on interpreting the TEM results, Johan Meersschaut for executing the RBS investigation and Robert Gehlhaar for his support in constructing an ellipsometry model. A heartfelt thank you goes to Hans Costermans and Kevin Dubois for their exceptional assistance with the MBE cluster tool. Additionally, the authors express their appreciation to Professor Valeri Afanasiev from KUL for his insights into the changes in optical properties observed in STO samples.
dc.identifier.doi10.3390/ma17081714
dc.identifier.issn1996-1944
dc.identifier.pmidMEDLINE:38673072
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43926
dc.publisherMDPI
dc.source.beginpageArt. 1714
dc.source.endpageN/A
dc.source.issue8
dc.source.journalMATERIALS
dc.source.numberofpages14
dc.source.volume17
dc.subject.keywordsDIFFUSION
dc.subject.keywordsEPITAXY
dc.subject.keywordsINTEGRATION
dc.subject.keywordsSILICON
dc.subject.keywordsOXIDES
dc.title

Impact of Cationic Stoichiometry on Physical, Optical and Electrical Properties of SrTiO3 Thin Films Grown on (001)-Oriented Si Substrates

dc.typeJournal article
dspace.entity.typePublication
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